EUV Gratings for OEMS
““Inprentus gratings have been key to enabling our company to create an entirely new product offering””
Inprentus offers custom master blazed gratings for EUV applications where optimization of optical efficiency, instrument compactness, and performance are priorities for next generation processing labs. Inprentus has the ability to manufacture diffraction gratings with extreme focusing abilities using high variable line spacing (VLS). This leads to optimization towards reduced spot size and brighter light at the operating wavelength. The gratings can be used in and around designwavelengths in a wide variety of sizes and specifications, enabling compact instrument designs and upgrades. Inprentus also works closely with customers to provide custom blaze angles in the grating masters to enable a drop-in replacement in a current instrument or next-generation instrument upgrade.
Specifications
• Blaze angles from 0.1° to 80°
• VLS - Variable Line Spacing (VLS)
• Echelle gratings
• Ruling on curved substrates – concave, toroidal, elliptical
• Resolving power above 100,000 (dependent on other specifications)
• High damage threshold substrates and overcoatings available
• Dimensions up to 500 x 200mm
• Line densities from 50 to 3000 l/mm
• Gold (Au) coated ruling surface with silicon or fused silica substrates
